Branched Siloxanes And Methods For Synthesis
作者： C. Grant Willson , MIchael B. Jacobsson , Tsuyoshi Ogawa
DOI: 10.26153/TSW/3833
关键词: Lithography 、 Materials science 、 Siloxane 、 Polymer science
摘要: The present invention describes branched and functionalized siloxanes methods for making such compounds. compounds have a variety of uses. One preferred application is as novel planarizing material lithography, in which case siloxane, an epoxy-modified siloxane particularly useful.
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