Nanofabrication of cylindrical STEM specimen of InGaAs/GaAs quantum dots for 3D-STEM observation
作者： Kazunari Ozasa , Yoshinobu Aoyagi , Masaya Iwaki , Masahiko Hara , Mizuo Maeda
DOI: 10.1016/J.ULTRAMIC.2004.04.001
关键词:
摘要: We demonstrate the multiazimuth observation (360 degrees in principle) of InGaAs/GaAs quantum dots (QDs) by means a 300 kV scanning transmission electron microscope (STEM), where both cross-sectional and plan-view observations are performed on single STEM specimen for first time. A cylindrical with diameter 200-300 nm including QD layer inside along rotation axis was fabricated focused ion beam (FIB) technique, application newly developed mesa-cutting method to adjust position angle precisely. The 360 is realized mounting holder equipped specimen-rotation mechanism. High potential 3D-STEM briefly presented showing high contrast images QDs, dark field images, moire fringes various incident angles.
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