Angular velocity sensor with vibrator having ring portion and electrodes positioned inside and outside the ring portion
作者： Ryuta Araki , Tsuyoshi Takemoto , Hiroshi Kawasaki , Kevin Townsend , Christopher P. Fell
DOI:
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摘要: A vibrator 10 , which is formed in a silicon wafer 1 by means of MEMS technique, has eight beam portions (beams) 12 supported at central portion 11 and extending the radial direction while mutually keeping same angle ring 13 connected to . Outside electrodes 21 h for electrostatic actuation, capacitance detection, or like are spaced uniformly with gap 22 created between Inside sixteen 23 frequency adjustment 24 23.
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