Apparatus and method for anchoring electrodes in MEMS devices
作者： Houri Johari-Galle , John A. Geen , Michael W. Judy
DOI:
关键词:
摘要: One or more electrodes that interact with a movable mass in MEMS device are anchored otherwise supported from both the top and bottom optionally also one of lateral sides other than transduction side (i.e., electrode facing mass) order to severely restrict movement such as interaction and/ external forces.
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