Corrugated diaphragm for a pressure sensor

摘要: The diaphragm comprises a peripheral zone (12) and central (16) in the same plane. Between these zones there is corrugated comprising 2n portions (18 1 to 18 4 ) which are separated by connection (20 20 ). Any one portion may be derived from adjacent rotation through 180° about zone, or else of 2π/2n axis followed symmetry housing