Effects of Crystallite Orientation on Environmental Stability and Lubrication Properties of Sputtered MoS2 Thin Films

摘要: The endurance lives of rf sputtered MoS2 lubricant films are severely degraded by exposure to high humidity environments prior wear testing. Surface chemical and electron microscopic analyses show that the oxidized form MoO3 oxidation rate is a function orientation crystallites composing before any run-in or burnishing activity. If arranged with their basal planes parallel substrate surface, have lower reactivity (good stability) longer than film randomly oriented crystallites. results surface tests presented support these observations. Auger spectroscopy indicate (designated Type I films) occurs depth at least 10 nm into bulk when they exposed adverse environments. Oxidation coplanar orientations (Type II films), however, only within 1 ...