Analysis of Oxidation State of Multilayered Catalyst Thin Films for Carbon Nanotube Growth Using Plasma-Enhanced Chemical Vapor Deposition
作者： Atsushi Okita , Atsushi Ozeki , Yoshiyuki Suda , Junji Nakamura , Akinori Oda
DOI: 10.1143/JJAP.45.8323
关键词:
摘要: We synthesized vertically aligned carbon nanotubes (CNTs) using multilayered catalyst thin films (Fe/Al2O3 and Al2O3/Fe/Al2O3) by RF (13.56 MHz) CH4/H2/Ar plasma-enhanced chemical vapor deposition. Pretreatment of the is crucial for CNT growth. In this paper, we analyzed effect reduction on Catalyst substrates were reduced H2 plasma pretreatment at 550 °C to form nanometer-sized particles. The analyzed; composition oxidation state X-ray photoelectron spectroscopy (XPS) surface morphology scanning electron microscopy (SEM). Fe 2p peak XPS spectra showed that FexOy in as-deposited was effectively a duration 4 min. Using catalyst, obtained CNTs with an average diameter 10.7 nm length 5.3 µm. However, longer than min resulted shorter shifted from Fe3O4. These transitions (Fe2O3→Fe3O4→Fe→Fe3O4) can be explained enthalpy oxides. This result indicates presence optimum ratio between maximize lengths.
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