Effects of oxygen on growth of carbon nanotubes prospered by PECVD

作者: J.L. Qi , L.X. Zhang , J. Cao , J.C. Feng

DOI: 10.1016/J.MATERRESBULL.2013.08.027

关键词:

摘要: Effects of oxygen on the growth carbon nanotubes (CNTs) using plasma-enhanced chemical vapor deposition (PECVD) have been studied. Oxygen gas was added to CH4/H2 atmosphere in CNTs process and produces a large number OH radicals. It is found that radical has strong etching effect CNTs, small amount can efficiently purify improve activity catalyst, thereby benefit synthesis high-quality aligned array. Contrarily, surface structure be etched damaged when content high, suppressed. expected method provided present study useful for array, purification, modification functionalization CNTs.

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