Growth model for plasma-CVD growth of carbon nano-tubes on Ni-sheets

作者: Wilfried Wunderlich

DOI: 10.1016/J.DIAMOND.2006.07.005

关键词:

摘要: The plasma enhanced chemical vapor deposition (PECVD) of carbon nano-tubes (CNT) on nickel sheets is considered as efficient production method great technologically interest. Different morphologies CNT Ni-sheets can be achieved by a variation the process parameters, like partial pressure acetylene and ammoniac inlet gas mixture, total pressure, temperature. results are summarized in detailed growth model based thermodynamic considerations. conclusion from this that single-wall (SWCNT), which more desirable than multi wall variants (MWCNT) or graphite nano-fibers (GNF), requires fastest reaction velocity for formation. PECVD supports formation, but enhancement additional inhibitors required.

参考文章(63)
M Endo, Y.A Kim, T Hayashi, K Nishimura, T Matusita, K Miyashita, M.S Dresselhaus, Vapor-grown carbon fibers (VGCFs) Carbon. ,vol. 39, pp. 1287- 1297 ,(2001) , 10.1016/S0008-6223(00)00295-5
Hari Singh Nalwa, Handbook of nanostructured materials and nanotechnology : Academic Press. ,(2000)
Michael A Lieberman, Alan J Lichtenberg, Principles of Plasma Discharges and Materials Processing ,(1994)
Z. W. Pan, S. S. Xie, B. H. Chang, C. Y. Wang, L. Lu, W. Liu, W. Y. Zhou, W. Z. Li, L. X. Qian, Very long carbon nanotubes Nature. ,vol. 394, pp. 631- 632 ,(1998) , 10.1038/29206
Jing Kong, Hyongsok T Soh, Alan M Cassell, Calvin F Quate, Hongjie Dai, None, Synthesis of individual single-walled carbon nanotubes on patterned silicon wafers Nature. ,vol. 395, pp. 878- 881 ,(1998) , 10.1038/27632
Wilfried Wunderlich, Masaki Tanemura, Interaction of Palladium Nano-Crystals with Hydrogen During PECVD Growth of Carbon Nanotubes Advances in Solid State Physics. pp. 171- 180 ,(2003) , 10.1007/978-3-540-44838-9_12
Chao Hsun Lin, Hui Lin Chang, Chih Ming Hsu, An Ya Lo, Cheng Tzu Kuo, The role of nitrogen in carbon nanotube formation Diamond and Related Materials. ,vol. 12, pp. 1851- 1857 ,(2003) , 10.1016/S0925-9635(03)00209-7
MS Bell, RG Lacerda, KBK Teo, NL Rupesinghe, GAJ Amaratunga, WI Milne, M Chhowalla, None, Plasma composition during plasma-enhanced chemical vapor deposition of carbon nanotubes Applied Physics Letters. ,vol. 85, pp. 1137- 1139 ,(2004) , 10.1063/1.1782256
Shigeo Maruyama, Ryosuke Kojima, Yuhei Miyauchi, Shohei Chiashi, Masamichi Kohno, Low-temperature synthesis of high-purity single-walled carbon nanotubes from alcohol Chemical Physics Letters. ,vol. 360, pp. 229- 234 ,(2002) , 10.1016/S0009-2614(02)00838-2
Tsung-Han Chen, Shih-Chin Chang, I.-Nan Lin, Pretreatment of Ni-carboxylates metal-organics for growing carbon nanotubes on silicon substrates Diamond and Related Materials. ,vol. 13, pp. 1242- 1248 ,(2004) , 10.1016/J.DIAMOND.2003.11.021