A palette of methods for computing pull-in curves for numerical models of microsystems

摘要: Modeling micro-electromechanical systems (MEMs) with Finite Elements is a widely used approach to analyze their behavior, particularly compute quasi-static instabilities such as pull-in originating from the strong electro-mechanical coupling between conducting and deforming parts. In this paper we discuss several solution techniques response of MEMs. Depending on type simulation (staggered or fully coupled), strategy (monolithic staggered) load parameter chosen drive system (applied potential, charge displacement), show that one can build palette solvers. Some methods outlined here are standard whereas other novel approaches. We respect ability voltage illustrate applicability efficiency an electro-mechanically coupled beam, structurally linear non-linear.