Moment detector using resistance element

摘要: Force and moment exerted on the working point (P) a semiconductor substrate (110, 210), one surface of which resistance elements (r, R) having an electric varying due to mechanical deformation are formed, detected. A portion spaced from is fixed. Since openings (113) or bridge portions (212 215) formed in substrate, when force angular fixed direction applied point, uneven stresses produced substrate. Such stesses detected as changes resistances elements. measure taken for arrangement thereby constitute predetermined bridges. Thus, forces three directions moments three-dimensional space can be independently read voltages, respectively.