Piezoelectric nanoelectromechanical systems
作者： Kaitlin M. Howell , Annalisa De Pastina , Andrea Lozzi , Tom Larsen , Muhammad Faizan
DOI: 10.1109/TRANSDUCERS.2017.7994010
关键词:
摘要: In this paper we describe five different transduction techniques for the motion of NEMS resonators. We how these differ from those used MEMS and centrosymmetric or amorphous materials can be to fabricate NEMS.
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