Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT)

摘要: In this paper we report an unprecedented level of integration self-actuated nanoelectromechanical system (NEMS) resonators based on a 150 nm thick lead zirconate titanate (PZT) thin film at the wafer-scale. A top-down approach combining ultraviolet (UV) lithography with other standard planar processing technologies allows us to achieve high-throughput manufacturing. Multilayer stack cantilevers different geometries have been implemented measured fundamental resonant frequencies in megahertz range and Q-factor values ranging from ~130 air up ~900 vacuum room temperature. refined finite element model taking into account exact configuration piezoelectric is proposed demonstrates importance considering dependence beam’s cross-section upon axial coordinate. We extensively investigate both experimentally theoretically transduction efficiency layer for first time constant d31 = 15 fm.V−1. Finally, discuss current limitations detection.