Temporary adhesives for wafer bonding: Deep reactive ion etching application
Dubreuil , Belharet , Granier , Mazenq
european microelectronics and packaging conference 1 -7
2009
Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT)
D Dezest , O Thomas , F Mathieu , L Mazenq
Journal of Micromechanics and Microengineering 25 ( 3) 035002
15
2015
Silicon-based micromembranes with piezoelectric actuation and piezoresistive detection for sensing purposes in liquid media
T Alava , F Mathieu , L Mazenq , C Soyer
Journal of Micromechanics and Microengineering 20 ( 7) 075014
18
2010
Efficient topology and design methodology for RF MEMS switches
B Ducarouge , D Dubuc , S Melle , K Grenier
Smart Sensors, Actuators, and MEMS II 5836 535 -539
5
2005
Top-down integration of suspended N+/P/N+ silicon-nanowire-based ion-sensitive field effect transistors for pH analysis at the submicronic scale
A Lale , A Grappin , A Lecestre , L Mazenq
Thin Solid Films 764 139609 -139609
4
2023
IC compatible MEMS technology
K Grenier , L Mazenq , D Dubuc , F Bouchriha
European Gallium Arsenide and Other Semiconductor Application Symposium, GAAS 2005 293 -296
2005
MEMS above IC technology applied to a compact RF module
K Grenier , L Mazenq , D Dubuc , E Ojefors
Smart Sensors, Actuators, and MEMS II 5836 504 -515
2
2005
La plateforme
L Mazenq , F Carcenac , PF Calmon , E Daran
2023
IC compatible MEMS technologies
K Grenier , L Mazenq , D Duboc , F Bouchriha
2005
Development of an ISFET-based analysis microsystem for nitrogen cycle monitoring in durum wheat crop
M Joly , S Assié Souleille , L Mazenq , M Marlet
PEDOT-modified electrochemical microsensors: a versatile probe for the detection of antioxidant biomarkers
F Sekli Belaidi , A Civélas , A Tsopela , L Mazenq
LARGE-SCALE FABRICATION OF NANOSTRUCTURES USING PDMS-BASED PHASE SHIFT LITHOGRAPHY, AND APPLICATION TO NANOFLUIDICS
Y Viero , Q He , L Mazenq , D Belharet
HAL-UPS
Y Viero , Q He , L Mazenq , H Ranchon
3D MEMS Circuits Integration for RF and Millimeterwave Communications D. Dubuc (2), K. Grenier MN Do", JP Busquère (1.3), A. Coustou", B. Ducarouge"
S Melle , L Mazenq , F Bouchriha , P Pons
CAS... Proceedings 1 119 -119
2001
MEMS above IC technology applied to a compact RF module (Keynote Paper)
K Grenier , L Mazenq , D Dubuc , E Ojefors
Proc. of International Society for Optical Engineering (SPIE), Smart Sensors, Actuators, and MEMS II 504 -515
2
2005
Biological functionalization of massively parallel arrays of nanocantilevers using microcontact printing
S Guillon , S Salomon , F Seichepine , D Dezest
Sensors and Actuators B-chemical 161 ( 1) 1135 -1138
26
2012
High-speed electrical injection for electro-absorption modulator vertically integrated on a VCSEL using low permittivity BCB
L Marigo-Lombart , C Viallon , A Rumeau , A Arnoult
IEEE J. Lightwave Technol
pH-ChemFET-based analysis devices for the bacterial activity monitoring
M POURCIELGOUZY , S ASSIESOULEILLE , L MAZENQ , J LAUNAY
Sensors and Actuators B-chemical 134 ( 1) 339 -344
15
2008
Grating design methodology for laser cooling
ROMAIN CALVIAC , ANTOINE MONMAYRANT , PASCAL DUBREUIL , LAURENT MAZENQ
2024