Adhesion force of polymeric three-dimensional microstructures fabricated by microstereolithography
作者： Dongmin Wu , Nicholas Fang , Cheng Sun , Xiang Zhang , None
DOI: 10.1063/1.1522825
关键词:
摘要: The adhesion between microstructures represents a great challenge in reliability of polymeric three-dimensional structures fabricated by microstereolithography (μSL). During the evaporative releasing, capillary force solvent causes deformation and beams. We present method to determine μSL. test with parallel beams were released from liquid resin via evaporation. By measuring relationship length geometry beams, two 1,6-hexanediol diacrylate (HDDA) is determined as γ=72±5 mN/m. This simple provide key designing reliable microelectromechanical systems preventing stiction problem.
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aip.org 参考文章(9)
X Zhang, X.N Jiang, C Sun, Micro-stereolithography of polymeric and ceramic microstructures Sensors and Actuators A: Physical. ,vol. 77, pp. 149- 156 ,(1999) , 10.1016/S0924-4247(99)00189-2
A. El Ghzaoui, Determination of surface energy of polymers by force microscopy Journal of Applied Physics. ,vol. 85, pp. 1231- 1233 ,(1999) , 10.1063/1.369348
C. Sun, X. Zhang, Experimental and numerical investigations on microstereolithography of ceramics Journal of Applied Physics. ,vol. 92, pp. 4796- 4802 ,(2002) , 10.1063/1.1503410
Chang-Jin Kim, John Y. Kim, Balaji Sridharan, Comparative evaluation of drying techniques for surface micromachining Sensors and Actuators A-physical. ,vol. 64, pp. 17- 26 ,(1998) , 10.1016/S0924-4247(98)80053-8
E. Manias, J. Chen, N. Fang, X. Zhang, Polymeric micromechanical components with tunable stiffness Applied Physics Letters. ,vol. 79, pp. 1700- 1702 ,(2001) , 10.1063/1.1400084
Hong-Bo Sun, Shigeki Matsuo, Hiroaki Misawa, Three-dimensional photonic crystal structures achieved with two-photon-absorption photopolymerization of resin Applied Physics Letters. ,vol. 74, pp. 786- 788 ,(1999) , 10.1063/1.123367
Satoshi Kawata, Hong-Bo Sun, Tomokazu Tanaka, Kenji Takada, Finer features for functional microdevices Nature. ,vol. 412, pp. 697- 698 ,(2001) , 10.1038/35089130
C.H. Mastrangelo, C.H. Hsu, Mechanical stability and adhesion of microstructures under capillary forces. I. Basic theory IEEE\/ASME Journal of Microelectromechanical Systems. ,vol. 2, pp. 33- 43 ,(1993) , 10.1109/84.232593
C.H. Mastrangelo, C.H. Hsu, Mechanical stability and adhesion of microstructures under capillary forces. II. Experiments IEEE\/ASME Journal of Microelectromechanical Systems. ,vol. 2, pp. 44- 55 ,(1993) , 10.1109/84.232594