A Large-Scanning-Angle, Electrothermal SCS Micromirror for Biomedical Imaging

摘要: This paper reports a 1mm-by-1mm single-crystal silicon (SCS)-based aluminum-coated micromirror (Fig. 1) that rotates 36° at 7.5 mA d.c. current. Large, flat micromirrors with large scanning angles are required by applications such as medical imaging and interferometer systems. SCS have been explored because of the manufacturability flatness SCS-based microstructures [1,2,3]. A previous rotated 17° 15 (d.c.) [3]. However, buckling employed bimorph mesh structure resulted in discontinuity angle versus current curve, which limited usable range to about 5°. From FEM simulation (Coventorware) we found orientation embedded poly-silicon resistor significantly changes temperature behavior micromirror. Fig. 2 illustrates difference between design new design. The 2(c)) has transversely oriented serpentine obtain uniform heating along transverse direction. results continuous response curve 2), an even larger rotation angle. is fabricated using deep reactive-ion-etch (DRIE) CMOS-MEMS processing [4].