124 $^\circ$ Rotation Angle Electrothermal Micromirror With Integrated Platinum Heater
作者： Lei Wu , Huikai Xie
DOI: 10.1109/JSTQE.2007.894066
关键词:
摘要: We report a single-crystal silicon (SCS)-based micromirror that is electrothermally actuated by platinum heater integrated at the end of thermal bimorph actuator. The mirror size 1 mm times1 mm. A large rotation angle 124 deg has been obtained dc voltage 12.5 V. resonant frequency device 336 Hz. radius curvature plate 130 lumped circuit model developed for electrothermomechanical behavioral simulation and design optimization. results match experimental data to within 6.9%
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