A dual-reflective electrothermal MEMS micromirror for full circumferential scanning endoscopic imaging
作者： Lei Wu , Huikai Xie
DOI: 10.1117/12.769621
关键词:
摘要: This paper reports the design, fabrication and measurements of a dual-reflective, single-crystal silicon based micromirror that can perform full circumferential scanning (FCS) for endoscopic optical coherence tomography (EOCT). In the proposed FCS-EOCT probe, two fibers are used to deliver light beams either surface micromirror, which can rotate ±45° (or 90°) thus 180° is obtained from each mirror surface, resulting in full circumferential scans. A novel surface- bulk-combined micromachining process on SOI wafers developed for fabricating dual reflective micromirror. The single-crystal-silicon device layer mirror flatness, Al coated both sides high reflectivity. With one beam delivered full 360° scans have been observed. Other measured data include resonant frequency: 328Hz, radius curvatures: - 124 mm (front surface) 127 (back surface), reflectances: 81.3% 79.0% surface).
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sci-hub.se 参考文章(10)
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