作者: K. Bobzin , E. Lugscheider , M. Maes , P. Immich , S. Bolz
DOI: 10.1016/J.TSF.2006.11.002
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摘要: Abstract Nowadays advanced TiAlN coatings enable high performance and speed cutting. A side from excellent coating adhesion at the cutting edges choice of material, a fine grained physical vapour deposition is enabler for these operations. Isotropy composition vital importance performance. On industrial scale equipment, (Ti–Al ratio), crystallite size orientation are altered by changing pulse energy, duty cycle cathode power. The synthesized then analyzed common thin film application oriented techniques, regarding grain its influence on properties. For determination size, two methods, Debye Scherrer Warren Averbach compared. Finally, determined using method transmission electron microscopy comparison reasons.