Deposition and characterization of non-isostructural (Ti0.7Al0.3N)/(Ti0.3Al0.7N) multilayers
作者： E.K. Tentardini , C. Kwietniewski , F. Perini , E. Blando , R. Hübler
DOI: 10.1016/J.SURFCOAT.2008.10.014
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摘要: Abstract Non-isostructural Ti 0.7 Al 0.3 N(cubic B1)/Ti N(hexagonal B4) nanoscale multilayers were deposited by dc magnetron sputtering on steel substrates, with nominal periods of 6, 10, 20 and 40 nm. The structure, composition, periodicity, interface abruptness the samples characterized X-ray diffraction, glow discharge optical spectroscopy, medium energy ion scattering, narrow resonant nuclear reaction profiling. nanohardness elastic modulus determined, revealing superhardness up to 57 GPa for lowest multilayer period. H 3 / E 2 ratios found be superior those most metal nitride commonly used as protective coatings, which indicates a wear resistance present nanostructured coating. results are discussed in terms stage understanding effects tribological properties coatings.
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