Mechanical and tribological properties of multilayered TiSiN/CrN coatings synthesized by a cathodic arc deposition process
作者： Sheng-Min Yang , Yin-Yu Chang , Dong-Yih Lin , Da-Yung Wang , Weite Wu
DOI: 10.1016/J.SURFCOAT.2007.09.004
关键词:
摘要: Abstract The monolayered TiSiN and multilayered TiSiN/CrN were synthesized by cathodic arc evaporation. Ti/Si (80/20 at.%) chromium targets used as the materials. With different I [TiSi] / [Cr] cathode current ratios of 1.8, 1.0, 0.55, coatings possessed multilayer periods ( Λ ) 8.3 nm, 6.2 nm, 4.2 nm. From XRD TEM analyses, both revealed a typical columnar structure B1-NaCl crystalline, no peaks crystalline Si 3 N 4 detected. Among coatings, coating with = 8.3 nm higher hardness 37 ± 2 GPa, elastic modulus 396 ± 20 GPa lower residual stress − 1.60 GPa than (Ti 0.39 0.07 )N 0.54 coating(− 7.25 GPa). Due to Cr/(Ti +Cr + Si) atomic ratio, = 5.5 nm lowest friction coefficient. But wear rate was obtained = 8.3 nm, because H /E ⁎ 2 ratio 0.323 GPa. highest 2.87 μm /min. Therefore, mechanical tribological property can be improved design coating.
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