Investigation of Fabrication Accuracy and Repeatability of High- $Q$ Silicon-Micromachined Narrowband Sub-THz Waveguide Filters
作者： Oleksandr Glubokov , Xinghai Zhao , James Campion , Bernhard Beuerle , Umer Shah
DOI: 10.1109/TMTT.2019.2926244
关键词:
摘要: This paper investigates the fabrication accuracy and repeatability of micromachined quadruplet filters designed at a center frequency 270 GHz with 5-GHz bandwidth using versatile multilayer chip platform which allows for axially arranged waveguide ports. A large number narrowband silicon-micromachined on multiple chips are investigated imperfections, assembly misalignment, yield, employing fabrication-prediction different chip-to-chip self-alignment feature strategies. numerical technique characterization entire process through extracting error statistics coupling coefficients samples from separately assembled is proposed. total 47 test in effectively 15 design variants have been fabricated two runs, evaluated, analyzed. The most critical sources errors determined. expected demonstrated yield analysis based collected statistics.
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