Piezoelectric polyimide tactile sensors

摘要: An important application of piezoelectric materials is for tactile sensing. For non-planar applications, polymer offer the potential to provide flexible sensors conforming a variety surface geometries. We have demonstrated fabrication process fabricating MEMS sensor structures using novel high-temperature polyimide as sensing material. The consists conventional lithography and metallization processes uses sacrificial layer photoresist. Electrodes are fabricated on upper lower surfaces suspended bridge cantilever self-test electrode underlying each component testing. Prototype been silicon substrates purposes demonstration characterization.