Chemically inert flow control with non-contaminating body
作者： Robert T. Chinnock , Charles Meacham , Clifford Miller
DOI:
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摘要: A flow controller including a unitary body with chemically inert fluid conduit having an insertable constriction or orifice disposed within the reduced cross-sectional area to thereby restrict of allowing for reliable measurement. An integrated circuit may becoupled control valve and also coupled pressure sensors by lead structure signal conductors surrounded Faraday cage, housing enclosing sensors.
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