Elastic properties in different nano-structured AlN films
作者： R. J. Jiménez Riobóo , P. Pigeat , V. Brien
DOI: 10.1007/S10853-009-3944-3
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摘要: A study of the transverse acoustic phonons on nano-structured AlN films has been carried out by using high-resolution micro-Brillouin spectroscopy. Dense have deposited radio frequency (r.f.) magnetron sputtering under ultra high vacuum at room temperature. Films with different morphologies were prepared and investigated transmission electron microscopy Brillouin Spectroscopy (equiaxed nano-sized, nano-columnar grains amorphous phase). Results show a dependence modes nano-structure. The film exhibits two transversal as expected for wurtzite while equiaxed nano-sized only exhibit one isotropic mode in materials. One important result is that sound propagation velocity phase higher than non-textured nano-crystalline phase. This phenomenon has, however, already observed ferroelectric ceramics.
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R. J. Jiménez Riobóo, E. Rodrı́guez-Cañas, M. Vila, C. Prieto, F. Calle, T. Palacios, M. A. Sánchez, F. Omnès, O. Ambacher, B. Assouar, O. Elmazria, Hypersonic characterization of sound propagation velocity in AlxGa1−xN thin films Journal of Applied Physics. ,vol. 92, pp. 6868- 6874 ,(2002) , 10.1063/1.1517728
Light Scattering in Solids VII lss4. ,vol. 54, ,(1982) , 10.1007/3-540-11942-6
Jae Hyoung Choi, Jeong Yong Lee, Jin Hyeok Kim, Phase evolution in aluminum nitride thin films on Si(100) prepared by radio frequency magnetron sputtering Thin Solid Films. ,vol. 384, pp. 166- 172 ,(2001) , 10.1016/S0040-6090(00)01859-9
I. Bretos, J. Ricote, R. Jiménez, J. Mendiola, R.J. Jiménez Riobóo, M.L. Calzada, Crystallisation of Pb1−xCaxTiO3 ferroelectric thin films as a function of the Ca2+ content Journal of The European Ceramic Society. ,vol. 25, pp. 2325- 2329 ,(2005) , 10.1016/J.JEURCERAMSOC.2005.03.051
H. Morkoç, S. Strite, G. B. Gao, M. E. Lin, B. Sverdlov, M. Burns, Large‐band‐gap SiC, III‐V nitride, and II‐VI ZnSe‐based semiconductor device technologies Journal of Applied Physics. ,vol. 76, pp. 1363- 1398 ,(1994) , 10.1063/1.358463
Carlos Rozo, Daniel Jaque, Luis F. Fonseca, José García Solé, Luminescence of rare earth-doped Si-ZrO2 co-sputtered films Journal of Luminescence. ,vol. 128, pp. 1197- 1204 ,(2008) , 10.1016/J.JLUMIN.2007.11.092
Xiaoping Li, Wei-Heng Shih, Size Effects in Barium Titanate Particles and Clusters Journal of the American Ceramic Society. ,vol. 80, pp. 2844- 2852 ,(1997) , 10.1111/J.1151-2916.1997.TB03202.X
T. Easwarakhanthan, M. B. Assouar, P. Pigeat, P. Alnot, Optical models for radio-frequency-magnetron reactively sputtered AlN films Journal of Applied Physics. ,vol. 98, pp. 073531- ,(2005) , 10.1063/1.2076444
V. Brien, P. Pigeat, Correlation between the oxygen content and the morphology of AlN films grown by r.f. magnetron sputtering Journal of Crystal Growth. ,vol. 310, pp. 3890- 3895 ,(2008) , 10.1016/J.JCRYSGRO.2008.06.021
I. Bretos, J. Ricote, R.J. Jiménez-Riobóo, L. Pardo, M.L. Calzada, Elastic instability of the nano-structured state as an intrinsic probe to study the early formation stages of sol–gel derived (Pb1-xCax)TiO3 thin films Applied Physics A. ,vol. 89, pp. 967- 973 ,(2007) , 10.1007/S00339-007-4179-2