Method and apparatus for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing

摘要: A method and apparatus for transmitting electrical signals fluids to and/or from a microelectronic workpiece. An in accordance with one embodiment of the invention includes shaft rotatable about axis having first end contact portion toward end, second opposite an internal channel along between ends. The can further have at least hole extending radially external surface shaft. still surface. housing rotatably receives has aperture coupleable fluid source sink. passage positioned adjacent holes communication when rotates relative housing. also engaged transmit portions while