Measurement configuration including a vehicle and method for performing measurements with the measurement configuration at various locations

摘要: A measurement device, i.e. a metrology tool, and vehicle are combined to provide mobile in fabrication facility. Peripheral equipment such as device transfer unit, for, e.g., FOUPs semiconductor manufacturing, an electronic control system with, PC, monitor, keyboard optionally vacuum pump is also provided module frames of the vehicle. The configuration particularly reduces bottleneck situations qualifying processing tools during fast ramp-up phases of, manufacturing facilities, thereby saving costs. construction based on PGVs or AGVs allows operation directly at location tool. With possible exception power supply operator control, can operate fully autonomously.