Fabrication pathway integrated metrology device
作者： Ravinder Aggarwal
DOI:
关键词:
摘要: An in-line, non-freestanding substrate measurement system is integrated into the fabrication pathway. One embodiment includes a metrology device guided vehicle. Another provides for simultaneously measuring both sides of substrate. A may be front handling chamber process tool. Other embodiments provide methods substrates using pathway devices.
lens.org 参考文章(29)
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