Vertical cavity surface emitting laser having multiple top-side contacts
作者： Colby Fitzgerald , James Robert Biard , R. Scott Penner , Ralph H. Johnson
DOI:
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摘要: A VCSEL with undoped mirrors. An essentially bottom DBR mirror is formed on a substrate. periodically doped first conduction layer region the mirror. The heavily at location where optical electric field about minimum. active layer, including quantum wells, region. second connected to layer. aperture in epitaxial structure above wells. top coupled and mesa structure. oxide around protect during wet oxidation processes.
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