Using a light microscope to measure motions with nanometer accuracy

摘要: A system for measuring nanometer motions of microscopic structures is demonstrated. Stop-action images a target are obtained with light microscope, CCD camera, and stroboscopic illuminator. Mo- tions determined directly from measured using algorithms computer vision. The accuracy motion measurements the assessed moving calibrated displacements. Accuracy specimens viewed under our most optimal conditions as well number suboptimal that illustrate important degradation mechanisms. Measured errors compared to predictions based on simulations theoretical models. Re- sults show hardware factors include substrate vibrations camera imperfections. Measurement primarily due systematic bias in vision algorithms. For conditions, can resolve small nanometers. Thus, both wavelength used obtain pixel spacing video microscope. © 1998 Society Photo-Optical Instrumentation Engineers. (S0091-3286(98)03904-X) Subject terms: microscopy; illumination; measure- ment; fixed-pattern noise; shot vibration.