Homogenous Thin Films Prepared on Microchannel Plates via Atomic Layer Deposition
作者： Bao Jun Yan , Shu Lin Liu , Lu Ping Yang
DOI: 10.4028/WWW.SCIENTIFIC.NET/AMR.1096.93
关键词:
摘要: Oxide thin films such as aluminum oxide doped with zinc (AZO), and (Al2O3) were prepared in the pores of microchannel plate (MCP) by atomic layer deposition (ALD), which is a precise control film thickness on substrate high aspect ratio structure. In this paper, homogenous deposited varied substrates ALD technology under different conditions, morphology, element distribution structure samples are systematically investigated scanning electron microscopy (SEM), energy dispersive x-ray (EDX), diffraction (XRD) respectively, The results show that technique good method to grow MCP.
irgrid.ac.cn参考文章(15)
A. S. Tremsin, J. B. McPhate, A. Steuwer, W. Kockelmann, A. M Paradowska, J. F. Kelleher, J. V. Vallerga, O. H. W. Siegmund, W. B. Feller, High‐Resolution Strain Mapping Through Time‐of‐Flight Neutron Transmission Diffraction with a Microchannel Plate Neutron Counting Detector Strain. ,vol. 48, pp. 296- 305 ,(2012) , 10.1111/J.1475-1305.2011.00823.X
E A Anyebe, Q Zhuang, M Kesaria, A Krier, The structural evolution of InN nanorods to microstructures on Si (111) by molecular beam epitaxy Semiconductor Science and Technology. ,vol. 29, pp. 085010- ,(2014) , 10.1088/0268-1242/29/8/085010
Yaser Abdulraheem, Ivan Gordon, Twan Bearda, Hosny Meddeb, Jozef Poortmans, Optical bandgap of ultra-thin amorphous silicon films deposited on crystalline silicon by PECVD AIP Advances. ,vol. 4, pp. 057122- ,(2014) , 10.1063/1.4879807
Matthew J. Wetstein, Bernhard Adams, Matthieu Chollet, Preston Webster, Zeke Insepov, Valentin Ivanov, Slade Jokela, Igor Veryovkin, Alex Zinovev, Jeffrey Elam, Anil Mane, Qing Peng, Henry Frisch, Systems-Level Characterization of Microchannel Plate Detector Assemblies, using a Pulsed sub-Picosecond Laser Physics Procedia. ,vol. 37, pp. 748- 756 ,(2012) , 10.1016/J.PHPRO.2012.03.717
C. Soto, W. T. Tysoe, The reaction pathway for the growth of alumina on high surface area alumina and in ultrahigh vacuum by a reaction between trimethyl aluminum and water Journal of Vacuum Science and Technology. ,vol. 9, pp. 2686- 2695 ,(1991) , 10.1116/1.577226
D.A. Tallarico, A.L. Gobbi, P.I. Paulin Filho, M.E.H. Maia da Costa, P.A.P. Nascente, Growth and surface characterization of TiNbZr thin films deposited by magnetron sputtering for biomedical applications Materials Science and Engineering: C. ,vol. 43, pp. 45- 49 ,(2014) , 10.1016/J.MSEC.2014.07.013
Chih-Hung Hsu, Jia-Ren Wu, Yen-Tien Lu, Dennis J Flood, Andrew R Barron, Lung-Chien Chen, None, Fabrication and characteristics of black silicon for solar cell applications: An overview Materials Science in Semiconductor Processing. ,vol. 25, pp. 2- 17 ,(2014) , 10.1016/J.MSSP.2014.02.005
A.C. Dillon, A.W. Ott, J.D. Way, S.M. George, Surface chemistry of Al2O3 deposition using Al(CH3)3 and H2O in a binary reaction sequence Surface Science. ,vol. 322, pp. 230- 242 ,(1995) , 10.1016/0039-6028(95)90033-0
OHW Siegmund, JB McPhate, AS Tremsin, SR Jelinsky, HJ Frisch, J Elam, A Mane, R Wagner, MJ Minot, J Renaud, M Deterando, Lappd Collaboration, 20 cm Sealed Tube Photon Counting Detectors with Novel Microchannel Plates for Imaging and Timing Applications Physics Procedia. ,vol. 37, pp. 803- 810 ,(2012) , 10.1016/J.PHPRO.2012.03.722
K. Inami, MCP-PMT development for Belle-II TOP counter Physics Procedia. ,vol. 37, pp. 683- 690 ,(2012) , 10.1016/J.PHPRO.2012.02.417