Optical bandgap of ultra-thin amorphous silicon films deposited on crystalline silicon by PECVD
作者： Yaser Abdulraheem , Ivan Gordon , Twan Bearda , Hosny Meddeb , Jozef Poortmans
DOI: 10.1063/1.4879807
关键词:
摘要: … Here we report on the optical properties of ultra-thin (<15 nm) a-Si:H layers grown on c-Si substrates by plasma enhanced chemical vapor deposition (PECVD). The layers were studied …
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