作者: Andrzej Badzian , Barbara Simonton , Teresa Badzian , Russell Messier , Karl E. Spear
DOI: 10.1117/12.936428
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摘要: Experiments were conducted on the deposition of diamond films from hydrogen and methane mixtures silicon substrates by a microwave plasma enhanced chemical vapor technique. Thin obtained. The crystallinity films, as determined electron diffraction, can be controlled changed polycrystalline to amorphous. method growing diamonds is discussed in historical perspective relationship optical properties natural CVD films.