Apparatus and method for diamond production
作者： Russell J. Hemley , Yogesh K. Vohra , Ho-Kwang Mao , Chih-shiue Yan
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摘要: An apparatus for producing diamond in a deposition chamber including heat-sinking holder holding and making thermal contact with side surface of the adjacent to an edge growth diamond, noncontact temperature measurement device positioned measure across main process controller receiving from controlling such that all gradients are less than 20° C. The method includes positioning is made measuring generate measurements, based upon growing single-crystal by microwave plasma chemical vapor on surface, wherein rate greater 1 micrometer per hour.
lens.org参考文章(34)
Keith A. Snail, High temperature, high rate, epitaxial synthesis of diamond in a laminar plasma ,(1991)
Jean-Pierre Vitton, Jean-Jacques Garenne, Sylvie Truchet, High quality homoepitaxial growth of diamond films Diamond and Related Materials. ,vol. 2, pp. 713- 717 ,(1993) , 10.1016/0925-9635(93)90209-K
Chih-Shiue Yan, Yogesh K. Vohra, Multiple twinning and nitrogen defect center in chemical vapor deposited homoepitaxial diamond Diamond and Related Materials. ,vol. 8, pp. 2022- 2031 ,(1999) , 10.1016/S0925-9635(99)00148-X
W. Müller‐Sebert, E. Wörner, F. Fuchs, C. Wild, P. Koidl, Nitrogen induced increase of growth rate in chemical vapor deposition of diamond Applied Physics Letters. ,vol. 68, pp. 759- 760 ,(1996) , 10.1063/1.116733
A. Afzal, C.A. Rego, W. Ahmed, R.I. Cherry, HFCVD diamond grown with added nitrogen: film characterization and gas-phase composition studies Diamond and Related Materials. ,vol. 7, pp. 1033- 1038 ,(1998) , 10.1016/S0925-9635(98)00148-4
Ji-an Xu, Ho-kwang Mao, Moissanite: A Window for High-Pressure Experiments Science. ,vol. 290, pp. 783- 785 ,(2000) , 10.1126/SCIENCE.290.5492.783
Alan T Collins, Hisao Kanda, Hiroshi Kitawaki, Colour changes produced in natural brown diamonds by high-pressure, high-temperature treatment Diamond and Related Materials. ,vol. 9, pp. 113- 122 ,(2000) , 10.1016/S0925-9635(00)00249-1
R. E. Stallcup, J. M. Perez, Scanning Tunneling Microscopy Studies of Temperature-Dependent Etching of Diamond (100) by Atomic Hydrogen Physical Review Letters. ,vol. 86, pp. 3368- 3371 ,(2001) , 10.1103/PHYSREVLETT.86.3368
Mikka Nishitani-Gamo, Isao Sakaguchi, Kian Ping Loh, Hisao Kanda, Toshihiro Ando, Confocal Raman spectroscopic observation of hexagonal diamond formation from dissolved carbon in nickel under chemical vapor deposition conditions Applied Physics Letters. ,vol. 73, pp. 765- 767 ,(1998) , 10.1063/1.121994
B.V. Spitsyn, L.L. Bouilov, B.V. Derjaguin, Vapor growth of diamond on diamond and other surfaces Journal of Crystal Growth. ,vol. 52, pp. 219- 226 ,(1981) , 10.1016/0022-0248(81)90197-4