Flexureless multi-stable micromirrors for optical switching

摘要: An array of micromirror devices is fabricated using standard surface-micromachining techniques such that the reflective mirror surfaces are anchored by a trapped joint rather than rigid support flexures. These therefore multi-stable in actuation continuous like typical which restoring spring force flexures used to balance electrostatic actuation. As result, flexureless can be actuated specific stable positions make it ideal for optical switching. Since no direct mechanical connection required surfaces, these switched between binary fashion and at higher speeds.