Fabrication and electric characterization of the n-ZnO/ p-nanocrystalline diamond film heterojunction

作者: J Huang , L J Wang , R Xu , K Tang , J M Lai

DOI: 10.1088/1742-6596/152/1/012017

关键词:

摘要: A heterojunction of n-ZnO / p-nanocrystalline diamond (NCD) film was fabricated, where the undoped p-type NCD and n-type ZnO were grown by microwave plasma chemical vapor deposition (MPCVD) method radio-frequency (RF) reactive magnetron sputtering method, respectively. The structure morphology analyzed Raman spectroscopy, X-ray diffraction (XRD) atomic force microscopy (AFM). carrier sheet densities measured Hall Effect 1.3?1012 cm-2 8.9?1014 cm-2, I-V characterization p-NCD indicated that this rectifying in nature with a turn-on voltage about 0.6V.

参考文章(17)
D. Zhou, D. M. Gruen, L. C. Qin, T. G. McCauley, A. R. Krauss, Control of diamond film microstructure by Ar additions to CH4/H2 microwave plasmas Journal of Applied Physics. ,vol. 84, pp. 1981- 1989 ,(1998) , 10.1063/1.368331
A. C. Ferrari, J. Robertson, Origin of the1150−cm−1Raman mode in nanocrystalline diamond Physical Review B. ,vol. 63, pp. 121405- ,(2001) , 10.1103/PHYSREVB.63.121405
K. Tankala, T. DebRoy, M. Alam, Oxidation of diamond films synthesized by hot filament assisted chemical vapor deposition Journal of Materials Research. ,vol. 5, pp. 2483- 2489 ,(1990) , 10.1557/JMR.1990.2483
Cheng-Xin Wang, Guo-Wei Yang, Tie-Chen Zhang, Hong-Wu Liu, Yong-Hao Han, Ji-Feng Luo, Chun-Xiao Gao, Guang-Tian Zou, High-quality heterojunction between p-type diamond single-crystal film and n-type cubic boron nitride bulk single crystal Applied Physics Letters. ,vol. 83, pp. 4854- 4856 ,(2003) , 10.1063/1.1631059
C.X. Wang, G.W. Yang, T.C. Zhang, H.W. Liu, Y.H. Han, J.F. Luo, C.X. Gao, G.T. Zou, Fabrication of transparent p-n hetero-junction diodes by p-diamond film and n-ZnO film Diamond and Related Materials. ,vol. 12, pp. 1548- 1552 ,(2003) , 10.1016/S0925-9635(03)00237-1
H. Noda, A. Hokazono, H. Kawarada, Device modeling of high performance diamond MESFETs using p-type surface semiconductive layers Diamond and Related Materials. ,vol. 6, pp. 865- 868 ,(1997) , 10.1016/S0925-9635(96)00725-X
M. I. Landstrass, K. V. Ravi, Hydrogen passivation of electrically active defects in diamond Applied Physics Letters. ,vol. 55, pp. 1391- 1393 ,(1989) , 10.1063/1.101604
Hui Jin Looi, Richard B. Jackman, John S. Foord, High carrier mobility in polycrystalline thin film diamond Applied Physics Letters. ,vol. 72, pp. 353- 355 ,(1998) , 10.1063/1.120734
F.A.M. Köck, J.M. Garguilo, R.J. Nemanich, Field enhanced thermionic electron emission from sulfur doped nanocrystalline diamond films Diamond and Related Materials. ,vol. 14, pp. 704- 708 ,(2005) , 10.1016/J.DIAMOND.2004.12.056
M. S. Wong, R. Meilunas, T. P. Ong, R. P. H. Chang, Tribological properties of diamond films grown by plasma‐enhanced chemical vapor deposition Applied Physics Letters. ,vol. 54, pp. 2006- 2008 ,(1989) , 10.1063/1.101197