Differential pressure measuring transducer assembly
作者： Michitaka Shimazoe , Hideyuki Nemoto , Yoshitaka Matsuoka , Masanori Tanabe , Ryozo Akahane
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摘要: A differential pressure measuring transducer assembly including a diaphragm formed of semiconductor material having gauge resistance elements on one surface thereof and central boss area large thickness peripheral support flange the other defining therebetween an annular portion small thickness. The is attached at to glass member metallic with conducting bores respectively communicating each other. Young's modulus substantially equal that diaphragm.
lens.org 参考文章(8)
Cecil K Stedman, Transducers with substantially linear response characteristics ,(1965)
J. Hardy House, Solid state force transducer ,(1977)
Tamotsu Tominaga, Teruyoshi Mihara, Pressure sensor having semiconductor diaphragm ,(1979)
L Leidy, R Whitehead, Differential pressure responsive apparatus ,(1972)
Joseph R. Mallon, Anthony D. Kurtz, Media compatible pressure transducer ,(1979)
Akio Tanaka, Pressure-electric transducers ,(1976)
Donald L. Critten, Charles E. Bardwell, Differential pressure sensing devices ,(1978)
Mario Di Giovanni, Differential pressure measuring transducer assembly ,(1977)