Continuous ionizer for semiconductor manufacturing processes

摘要: A continuous ionizer adapted to introduce selected ions into a continually flowing stream of liquid. To ensure that maximum concentration is incorporated, the configured so turbulent and intimate mixing ionizing gas liquid be ionized occurs. The flow regulated by level sensor prevent gas/liquid mixture from proceeding downstream ionizer. apparatus method this invention are particularly suited situations where deionized water used in process which causes undesired static electricity discharges, clean, ion-possessing preferred, such as semiconductor processing.