Method for controlling a semiconductor manufacturing process by failure analysis feedback

摘要: A method for controlling a semiconductor manufacturing process by failure analysis feedback compares previous result with current real-time conditions. The uses the steps of: a) establishing monitoring data base abnormal condition data, being obtained correlation between yield each manufactured lot and corresponding conditions equipment when is lowered or malfunctions have occurred; b) an obtaining on-line equipment; c) comparing of base; d) stopping operation differences fall below predetermined level.