Production system for manufacturing semiconductor devices

摘要: A production system for manufacturing semiconductor devices comprises apparatus making a wafer during first process step. plurality of devices, or chips are arranged and incorporated in the wafer. second processes material step production. An inspection provides an automatic function between steps. The result is automatically estimated by apparatus, with respect to specification value central within value. connected third carrying out at least one further after Accordingly, if estimate value, but adjustment instruction signal can be sent either compensate direction