Nanopore processing in dielectric materials and dielectric template-assisted nanoarray synthesis: Using pulsed bias to enhance process throughput and precision

摘要: An effective technique to improve the precision and throughput of energetic ion condensation through dielectric nanoporous templates reduce nanopore clogging by using finely tuned pulsed bias is proposed. Multiscale numerical simulations deposition show possibility controlling dynamic charge balance on upper template’s surface minimize sidewalls deposit ions selectively substrate in contact with pore opening. In this way, shapes nanodots template-assisted nanoarray fabrication can be effectively controlled. The results are applicable various processes involving porous nanomaterials dense nanoarrays.