On producing high-spatial-resolution composition profiles via scanning transmission electron microscopy
作者： Ernest L. Hall , Douglas Imeson , John B. Vander Sande
DOI: 10.1080/01418618108239528
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摘要: Abstract Measurement of the concentration variation a grain boundary segregant near has been chosen as system in which to investigate spatial resolution attainable by X-ray microanalysis scanning transmission electron microscope (STEM). In this paper extensive experimental work on Fe-doped MgO is compared with theoretical model examines effect incident probe size and beam broadening sample profiles measured using standard analysis data. It shown that extent segregation can be determined dependent size. The magnitude peak concentrations at are, however, strongly hence foil thickness. Comparing calculated results suggests may not great current estimates would predict.
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