Micro-electromechanical switch
作者： John Michael Parsey , Ji-Hai Xu , Jenn-Hwa Huang , Xi-Qing Sun
DOI:
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摘要: A Micro-Electromechanical System (MEMS) switch (100) having a single, center hinge (120) which supports membrane-type electrode (104) on substrate (101). The has control coupled to the (101) by an anchor (113), collar (121), set of arms (122, 123). shorting bar (106) thereto and is electrically isolated from another (105), formed travel stop (130) positioned between (104). Another aspect present invention Single Pole, Double Throw (SPDT) (160) into incorporated (170) (185, 186).
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