Nanopositioning performance of MIMO MPC

摘要: Model predictive control (MPC) refers to a class of computer algorithms which is commonly used when tracking reference trajectory the primary goal. It minimizes steady-state error, increases closed-loop bandwidth, and enables controller track signal, major requirements for nanopositioning applications. These capabilities MPC controllers have motivated this research improve positioning performance piezoelectric tube scanner (PTS) better imaging an atomic force microscope (AFM). The multi-input multi-output (MIMO) form designed in work compensates cross-coupling effect while damping compensator augmented with plant enhances its capability. To evaluate improvement using proposed frame work, experimental comparison existing AFM proportionalintegral (PI) conducted demonstrates that it image quality scanning speeds up 125 Hz.