A high-performance silicon micropump for an implantable drug delivery system
作者： D. Maillefer , H. van Lintel , G. Rey-Mermet , R. Hirschi
DOI: 10.1109/MEMSYS.1999.746886
关键词:
摘要: This paper describes the design and measurement results of a new silicon piezoelectric micropump developed to be heart an implantable drug infusion system. The device is based on bulk micromachining, pyrex anodic bonding actuation. pumping mechanism has been designed for maximum safety reliability together with high open-loop accuracy (/spl plusmn/10%) in low flow rate range (0-100 /spl mu/1/h). It ensures constant stroke volume (150 nl) over wide working conditions through implementation double limiter, controlling membrane. Consequently, linear actuation frequency virtually insensitive inlet outlet pressure, voltage, temperature, viscosity aging. pump self-priming dead ratio Delta/V/V/sub 0/=1.15. also features on-chip barrier filter particle protection functional detector. More than 100 pumps last generation have fabricated fully tested.
sci-hub.se 参考文章(8)
Yit Shun Leungki, Harald van Lintel, Micromachined filter for a micropump ,(1997)
M. Stehr, H. Gruhler, H. Straatmann, S. Messner, H. Sandmaier, R. Zengerle, The selfpriming VAMP Sensors. ,vol. 1, pp. 351- 352 ,(1997) , 10.1109/SENSOR.1997.613656
Harald T. G. van Lintel, Valve and micropump incorporating said valve ,(1991)
M. Richter, R. Linnemann, P. Woias, Robust design of gas and liquid micropumps Sensors and Actuators A-physical. ,vol. 68, pp. 480- 486 ,(1998) , 10.1016/S0924-4247(98)00053-3
H.T.G. van Lintel, F.C.M. van De Pol, S. Bouwstra, A piezoelectric micropump based on micromachining of silicon Sensors and Actuators. ,vol. 15, pp. 153- 167 ,(1988) , 10.1016/0250-6874(88)87005-7
P Gravesen, J Branebjerg, O S Jensen, Microfluidics-a review Journal of Micromechanics and Microengineering. ,vol. 3, pp. 168- 182 ,(1993) , 10.1088/0960-1317/3/4/002
K-P Kamper, J Dopper, W Ehrfeld, S Oberbeck, None, A self-filling low-cost membrane micropump international conference on micro electro mechanical systems. pp. 432- 437 ,(1998) , 10.1109/MEMSYS.1998.659796
R. Linnemann, P. Woias, C.-D. Senfft, J.A. Ditterich, A self-priming and bubble-tolerant piezoelectric silicon micropump for liquids and gases international conference on micro electro mechanical systems. pp. 532- 537 ,(1998) , 10.1109/MEMSYS.1998.659814