Sensors and Actuators on CMOS Platforms

摘要: The monolithic or hybrid integration of sensors and actuators (S&A) onto CMOS platforms is great importance to reduce the device size cost as well facilitate new functionalities better performance. Hence, S&As on are important convincing examples “more than Moore.” This chapter focuses a broad range aspects platforms. First, basic concept introduced, followed by detailed description fundamentals current S&A concepts. market situation then described, demonstrating opportunities for S&As. A substantial part devoted various techniques fabrication processes CMOS. Successful very large-scale (VLSI) ofS&As also described. Current research into use nanostructures improved performance described in an additional subsection. Finally, equally back-end-of-the-line large-volume production, packaging, testing presented. closes with authors’ outlook view challenges research, development, marketing S&As, VLSI-type single-chip platforms, networks.