A high-performance dipole surface drive for large travel and force
作者： S. Hoen , Q. Bai , J.A. Harley , D.A. Horsley , F. Matta
DOI: 10.1109/SENSOR.2003.1395506
关键词:
摘要: We report unparalleled travel, force, precision and repeatability with an electrostatically actuated dipole surface drive. have successfully demonstrated motors that generate several hundred micronewtons while traveling 50 microns at 60 V. Without external feedback control, the can be positioned nanometer resolution repeatability. The manufacture of these uses a two-level polysilicon deposition, wafer bond two anisotropic deep silicon etches.
stanford.edu 
sci-hub.se 参考文章(10)
Samuel Lee Miller, Stephen M. Barnes, Murray Steven Rodgers, Paul Jackson McWhorter, Jeffry J. Sniegowski, Microelectromechanical apparatus for elevating and tilting a platform ,(2001)
M.S. Rodgers, S. Kota, J. Hetrick, Z. Li, B.D. Jensen, T.W. Krygowski, S.L. Miller, S.M. Barnes, M.S. Burg, A new class of high force, low-voltage, compliant actuation system 2000 Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC (US), 06/04/2000--06/08/2000. ,(2000) , 10.31438/TRF.HH2000.51
Jaejoon Choi, Hong sik Park, Kyu yong Kim, Jong up Jeon, Electromagnetic micro x-y stage with very thick Cu coil for probe-based mass data storage device SPIE's 8th Annual International Symposium on Smart Structures and Materials. ,vol. 4334, pp. 363- 371 ,(2001) , 10.1117/12.436622
M. Lutwyche, R. Stutz, R. Widmer, P. Vettiger, H. Rothuizen, U. Drechsler, G. Genolet, W. Häberle, Fabrication of a micromachined magnetic X/Y/Z scanner for parallel scanning probe applications Microelectronic Engineering. ,vol. 53, pp. 509- 512 ,(2000) , 10.1016/S0167-9317(00)00366-X
S. Hoen, P. Merchant, G. Koke, J. Williams, Electrostatic surface drives: theoretical considerations and fabrication Sensors. ,vol. 1, pp. 41- 44 ,(1997) , 10.1109/SENSOR.1997.613576
P. Vettiger, G. Cross, M. Despont, U. Drechsler, U. Durig, B. Gotsmann, W. Haberle, M.A. Lantz, H.E. Rothuizen, R. Stutz, G.K. Binnig, The "millipede" - nanotechnology entering data storage IEEE Transactions on Nanotechnology. ,vol. 1, pp. 39- 55 ,(2002) , 10.1109/TNANO.2002.1005425
Storrs T. Hoen, Optical cross-connect switch using electrostatic surface actuators ,(2000)
J.D. Berger, Y. Zhang, J.D. Grade, H. Lee, S. Hrinya, H. Jerman, Widely tunable external cavity diode laser based on a MEMS electrostatic rotary actuator optical fiber communication conference. ,vol. 2, ,(2001) , 10.1109/OFC.2001.927336
D.A. Horsley, P.G. Hartwell, R.G. Walmsley, J. Brandt, U. Yoon, S. Hoen, Multi-Degree of Freedom Dynamic Characterization of Deep-Etched Silicon Suspensions 2000 Solid-State, Actuators, and Microsystems Workshop Technical Digest. ,(2000) , 10.31438/TRF.HH2000.20
J.D. Grade, H. Jerman, T.W. Kenny, A Large-Deflection Electrostatic Actuator for Optical Switching Applications 2000 Solid-State, Actuators, and Microsystems Workshop Technical Digest. ,(2000) , 10.31438/TRF.HH2000.24