Elaboration and characterization of sol–gel derived ZrO2 thin films treated with hot water
作者： Mun Teng Soo , Niki Prastomo , Atsunori Matsuda , Go Kawamura , Hiroyuki Muto
DOI: 10.1016/J.APSUSC.2012.02.008
关键词:
摘要: Abstract We describe the preparation and characterization of zirconia (ZrO2) thin films via sol–gel route by spin-coating method. By utilizing alkoxide s Zr[O(CH2)3CH3]4 in presence ethanol (EtOH), nitric acid acetylacetone as a chelating agent, stable sol ZrO2 was obtained. Smooth surface morphology with nano-cracks exhibited for all being fabricated. The film thickness varied from 39 to 206 nm depending on molar ratio EtOH during also annealing temperature applied. All possess high optical transmittance. Refractive index ranging 1.6 2.4 temperature. Tetragonal phase formed after annealed at 400 °C. Crystallinity enhanced increasing EtOH. Crystallite size tetragonal ranged 3.0 9.9 nm. A hot-water treatment reduced further improved crystallinity derived oxide.
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