Substrate transfer mechanism and subtrate transfer apparatus including same, particle removal method for the subtrate transfer mechanism and apparatus, program for executing the method, and storage medium for storing the program

摘要: A substrate transfer mechanism for transferring a includes mounting table on which the is mounted; an arm member connected to and moving it. The further temperature control unit controlling of table, wherein forms gradient in table. detector detecting environment or chamber installed heater heating controller operation based detected by detector.