Method and apparatus for removing organic materials

作者: Kang-Hee Lee , Seung-yeon Lee , Seon-Ah Jin , Jun-Ho Lee

DOI:

关键词: AdsorptionMaterials scienceObject (computer science)Nanotechnology

摘要: A method for removing organic materials includes providing a target object having the adsorbed thereon, and an adsorbent, into space including non-liquid medium therein; separating from by applying ultrasound waves to thereon adsorbent in space, disposing adsorbent.

参考文章(12)
Nobuyuki Nagayama, Tsuyoshi Moriya, Hidefumi Matsui, Vacuum exhaust method and a substrate processing apparatus therefor ,(2009)
John Glen Ahles, Thomas David Ehlert, Steve Roffers, Paul Warren Rasmussen, Robert Allen Janssen, John Gavin Macdonald, Kimberlee Fay Thompson, Patrick Sean Mcnichols, Earl C. Mccraw, Ultrasonic treatment system for separating compounds from aqueous effluent ,(2007)
Kikuo Okuyama, Toshiaki Fujii, Manabu Shimada, Method and apparatus for removing particles from surface of article ,(1997)
Kazuto Nishida, Kazuyuki Tomita, Naoki Suzuki, Apparatus and method for surface treatment to substrate ,(2006)
Charles T. Kresge, Wieslaw J. Roth, Michael E. Leonowicz, James C. Vartuli, Synthetic mesoporous crystaline material ,(1990)
Jin-lang Wu, Kun-lin Guan, Wei-Jen Liu, Apparatus and method for preventing chamber contamination ,(1998)
Kazuhiro Fukumoto, Kenichiro Suzuki, 賢一郎 鈴木, 和広 福本, アニール シンハ, Anil Sinha, Mesoporous body, air purifying material, and method of manufacturing mesoporous body ,(2004)